一种用于MCP的新型防离子反馈膜

A New Ion Barrier Film for Micro-channel Plates

  • 摘要: 传统技术制备的MCP防离子反馈膜在一定程度上会影响像管的信噪比,长时间的工作条件下也会降低像管的可靠性,基于传统防离子反馈膜缺陷导致的像管信噪比和可靠性性能亟需改善和提高的迫切需求,开展一种用于MCP的新型防离子反馈膜研究。采用原子层沉积技术(Atomic Layer Deposition, ALD)在有较高长径比的MCP通道内壁及输入端的通道孔处制备一层连续的高质量U型结构的防离子反馈膜,经MCP综合检测装置测试,与传统技术制备的MCP部件性能相比,新型防离子反馈膜致密,增益值较高,部件含碳量低,新型防离子反馈膜的MCP部件经制管后像管信噪比高,寿命可靠性高,此技术制备的新型防离子反馈MCP部件对与像增强器信噪比和可靠性性能的提升具有重要意义。

     

    Abstract: The microchannel plate (MCP) ion barrier film produced by traditional technology affects the signal-to-noise ratio (SNR) of the image tube to a certain extent, and long-term working conditions reduce the reliability of the image tube. Due to the urgent need to improve and enhance the SNR and reliability of image tubes caused by defects in traditional ion barrier films, a new type of ion barrier film for MCP must be developed. In this study, a continuous high-quality U-shaped ion barrier film was prepared using atomic layer deposition on the inner wall of MCP channels with high aspect ratios and channel holes at the input end. The film quality and electrical performance were tested using an MCP comprehensive detection device and compared with the performance of MCP components prepared by traditional technology. The new ion barrier film is dense, with high gain values and low carbon content in the components. The new MCP components exhibit a high SNR and high lifespan reliability after tube preparation. New MCP components produced using this technology are of great significance for improving the SNR and reliability of image intensifiers.

     

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