A Study on Regrowning of Ge/Si Heterostructures Made By Magnitron Sputter Deposition after Annealed

doi:10.3969/j.issn.1001-8891.2002.02.009

A Study on Regrowning of Ge/Si Heterostructures Made By Magnitron Sputter Deposition after Annealed[J]. Infrared Technology , 2002, 24(2): 34-36,40. DOI: 10.3969/j.issn.1001-8891.2002.02.009

Citation:

A Study on Regrowning of Ge/Si Heterostructures Made By Magnitron Sputter Deposition after Annealed[J]. Infrared Technology , 2002, 24(2): 34-36,40. DOI: 10.3969/j.issn.1001-8891.2002.02.009

Citation:

A Study on Regrowning of Ge/Si Heterostructures Made By Magnitron Sputter Deposition after Annealed[J]. Infrared Technology , 2002, 24(2): 34-36,40. DOI: 10.3969/j.issn.1001-8891.2002.02.009

A Study on Regrowning of Ge/Si Heterostructures Made By Magnitron Sputter Deposition after Annealed

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