LANG Jia-hong, QIN Fu-wen, GU Biao. Study on Thin Film Growth Temperature by ECR-PEMOCVD Based on the Double Thermocouples[J]. Infrared Technology , 2007, 29(2): 79-82. DOI: 10.3969/j.issn.1001-8891.2007.02.005
|
Citation:
|
LANG Jia-hong, QIN Fu-wen, GU Biao. Study on Thin Film Growth Temperature by ECR-PEMOCVD Based on the Double Thermocouples[J]. Infrared Technology , 2007, 29(2): 79-82. DOI: 10.3969/j.issn.1001-8891.2007.02.005
|
LANG Jia-hong, QIN Fu-wen, GU Biao. Study on Thin Film Growth Temperature by ECR-PEMOCVD Based on the Double Thermocouples[J]. Infrared Technology , 2007, 29(2): 79-82. DOI: 10.3969/j.issn.1001-8891.2007.02.005
|
Citation:
|
LANG Jia-hong, QIN Fu-wen, GU Biao. Study on Thin Film Growth Temperature by ECR-PEMOCVD Based on the Double Thermocouples[J]. Infrared Technology , 2007, 29(2): 79-82. DOI: 10.3969/j.issn.1001-8891.2007.02.005
|
DownLoad: