Growth and Thickness Uniformity Research of Amorphous MCT Films under Different Target Spacings[J]. Infrared Technology , 2011, 33(1): 13-16. DOI: 10.3969/j.issn.1001-8891.2011.01.004
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Citation:
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Growth and Thickness Uniformity Research of Amorphous MCT Films under Different Target Spacings[J]. Infrared Technology , 2011, 33(1): 13-16. DOI: 10.3969/j.issn.1001-8891.2011.01.004
|
Growth and Thickness Uniformity Research of Amorphous MCT Films under Different Target Spacings[J]. Infrared Technology , 2011, 33(1): 13-16. DOI: 10.3969/j.issn.1001-8891.2011.01.004
|
Citation:
|
Growth and Thickness Uniformity Research of Amorphous MCT Films under Different Target Spacings[J]. Infrared Technology , 2011, 33(1): 13-16. DOI: 10.3969/j.issn.1001-8891.2011.01.004
|
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