LIU Li-ming, MO Jing-hui, SHI Yan-li, ZENG Hua-rong, YANG Pei-zhi. Structure and Property Study on Vanadium Oxide Thin Films Deposited by Radio Frequency Magnetron Sputtering Technique[J]. Infrared Technology , 2012, 34(5): 260-264. DOI: 10.3969/j.issn.1001-8891.2012.05.003
Citation: LIU Li-ming, MO Jing-hui, SHI Yan-li, ZENG Hua-rong, YANG Pei-zhi. Structure and Property Study on Vanadium Oxide Thin Films Deposited by Radio Frequency Magnetron Sputtering Technique[J]. Infrared Technology , 2012, 34(5): 260-264. DOI: 10.3969/j.issn.1001-8891.2012.05.003

Structure and Property Study on Vanadium Oxide Thin Films Deposited by Radio Frequency Magnetron Sputtering Technique

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