SUN Xiang-le, SUN Qian, SUN Jin-ni, WANG Yi-feng, YU Lian-jie, LIU Li-ming. A Method of Improving the Thickness Uniformity of Thin Film Deposited by Magnetron Sputtering[J]. Infrared Technology , 2012, 34(5): 265-267. DOI: 10.3969/j.issn.1001-8891.2012.05.004
|
Citation:
|
SUN Xiang-le, SUN Qian, SUN Jin-ni, WANG Yi-feng, YU Lian-jie, LIU Li-ming. A Method of Improving the Thickness Uniformity of Thin Film Deposited by Magnetron Sputtering[J]. Infrared Technology , 2012, 34(5): 265-267. DOI: 10.3969/j.issn.1001-8891.2012.05.004
|
SUN Xiang-le, SUN Qian, SUN Jin-ni, WANG Yi-feng, YU Lian-jie, LIU Li-ming. A Method of Improving the Thickness Uniformity of Thin Film Deposited by Magnetron Sputtering[J]. Infrared Technology , 2012, 34(5): 265-267. DOI: 10.3969/j.issn.1001-8891.2012.05.004
|
Citation:
|
SUN Xiang-le, SUN Qian, SUN Jin-ni, WANG Yi-feng, YU Lian-jie, LIU Li-ming. A Method of Improving the Thickness Uniformity of Thin Film Deposited by Magnetron Sputtering[J]. Infrared Technology , 2012, 34(5): 265-267. DOI: 10.3969/j.issn.1001-8891.2012.05.004
|
DownLoad: