HE Min, LI Wei, LI Yu-li, SUN Yan, JIANG Ya-dong. Optical Optimization and Simulation of Micro-bolometers Based on α-Si:H Thin Film[J]. Infrared Technology , 2012, 34(6): 319-324,331. DOI: 10.3969/j.issn.1001-8891.2012.06.003
Citation: HE Min, LI Wei, LI Yu-li, SUN Yan, JIANG Ya-dong. Optical Optimization and Simulation of Micro-bolometers Based on α-Si:H Thin Film[J]. Infrared Technology , 2012, 34(6): 319-324,331. DOI: 10.3969/j.issn.1001-8891.2012.06.003

Optical Optimization and Simulation of Micro-bolometers Based on α-Si:H Thin Film

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