GONG Yanni, YANG Wenyun, YANG Shaopei, FAN Mingguo, CHU Zhujun. Study on the ICPCVD Technology of Silicon Nitride Passivation Films for InP/InGaAs Detectors[J]. Infrared Technology , 2019, 41(6): 511-514.
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Citation:
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GONG Yanni, YANG Wenyun, YANG Shaopei, FAN Mingguo, CHU Zhujun. Study on the ICPCVD Technology of Silicon Nitride Passivation Films for InP/InGaAs Detectors[J]. Infrared Technology , 2019, 41(6): 511-514.
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GONG Yanni, YANG Wenyun, YANG Shaopei, FAN Mingguo, CHU Zhujun. Study on the ICPCVD Technology of Silicon Nitride Passivation Films for InP/InGaAs Detectors[J]. Infrared Technology , 2019, 41(6): 511-514.
|
Citation:
|
GONG Yanni, YANG Wenyun, YANG Shaopei, FAN Mingguo, CHU Zhujun. Study on the ICPCVD Technology of Silicon Nitride Passivation Films for InP/InGaAs Detectors[J]. Infrared Technology , 2019, 41(6): 511-514.
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